The equipment includes a complete vacuum/CVD system with its control
electronics, vacuum components, high vacuum pumps, RF power supplies,
actuators and sensors. The chassis, originally manufactured in 1998,
underwent a major upgrade in 2011 with newer components. According to
the system logs, it was last used in 2021.
The system is sold as is, for parts or repair, as the machine has not
been fully powered or tested. Only the electrical cabinet was turned
on. The system was not fully connected and did not have a password,
which precludes any further testing or verification of its compliance
with security standards.
The system consists of the following main components:
1X ALCATEL / ADIXEN / PFEIFFER ATH 1300M
2X Leybold Vacuum CTR 90 CERAVAC (1torr and 10torr)
1X VAT 26432-KA41-0001/0319 Vacuum Angle Valve
1X PFEIFFER IKR 251 HIGH VACUUM COMPACT COLD CATHODE
1X Wide HI VAC valve
1X Actuation System THC-8AWDS Linear Actuator 400mm
1x RF dressler - AE Dressler VM 1000 A, 1000 W 13.56 MHz
Control Unit
1X ALCATEL / ADIXEN / PFEIFFER ACT 1300M
1X magnetron drive ADVANCED ENERGY MDX 500 (does not turn on)
1X Cesar RF Power Supply
1X MKS, Type 252, 252C-1-VPO, Exhaust Valve Controller
1X MKS Type 152 Automatic Pressure Controller
1X 19\" rack-mount computer
Mass flow control cabinet (included)
(no password for the control software)
Palletizing and loading to be done by the buyer on site
Auction-ID: A1-47375-2