The equipment includes a complete vacuum/CVD system with its control
electronics, vacuum components, high vacuum pumps, RF power supplies,
actuators and sensors. The chassis, originally manufactured in 1998,
underwent a major upgrade in 2011 with newer components.
The system is sold as is, for parts or to be repaired. The system was
not fully connected and did not have a password, which precludes
further testing.
The system consists of the following main components:
Vacuum and pumping
components
Turbo pump ALCATEL / ADIXEN / PFEIFFER ATH 1300M
2 Leybold CTR 90 CERAVAC
vacuum cleaners
PFEIFFER IKR 251
Compact Cold Cathode Gauge
Vacuum Angle Valve TVA 26432-KA41-0001/0319
Large size
additional VAT vacuum valve
Large set of high
vacuum valves
Actuation System: THC-8AWDS Linear Actuator (400mm Stroke)
Various sensors, including pressure, temperature, and switching
Various actuators, including solenoid valves and heating
elements
CVD framework (original SP-500, modified in 2011)
Mass flow control cabinet (included)
RF Power and Power
Dressler RF Amplifier – AE Dressler VM 1000 A, 1000 W, 13.56
MHz
RF10S
RFPP Unit
Advanced Energy MDX 500 (Non-Functional – Does Not Turn On)
RF power AM-5 7600001010, 500 W, 13.56 MHz
TDK Lambda GEN40-125
Power Supply
Control unit and electronics
ALCATEL / ADIXEN / PFEIFFER ACT 1300M
controller
MKS Exhaust Valve Controller Type 252C-1-VPO
MKS Type 152
Automatic Pressure Controller
MKS Type 600
Automatic Pressure Controller
MKS Type 2708
19\" rackmount PC (no password for control software)
Palletizing and loading to be done by the buyer on site
Auction-ID: A1-47375-1